晶圆计量
Park AFM晶圆系统在晶圆制造过程中精确的纳米级测量和控制中起着至关重要的作用,确保设备的准确构建。
光掩模修复
用于光掩模修复的Park AFM提供了一个全面的解决方案,从自动缺陷检查到修复和后续验证,大大提高了修复效率和吞吐量。
先进封装
Park AFM's pioneering integration of White Light Interferometry (WLI) enhances quality assurance and process control across all semiconductor manufacturing stages, including advanced packaging and R&D metrology.
平板显示器
对于平板显示制造(包括OLED、LCD和光子学),Park AFM提供了一种高度准确且非破坏性的测量方法,优化用于超过300mm的大样品分析。
Optical Profilometry
Park Systems' optical profilometry solutions provide high-speed, non-contact surface metrology with nanometer-level vertical resolution, enabling accurate large-area surface measurement for semiconductor and advanced production environments.
HDD Media Inspection
Park AFM systems enable precise nanoscale surface analysis for HDD heads and automated defect detection for HDD substrates and media, ensuring stringent quality standards and improved manufacturing yield.